kinevon
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Yes, if their speed in that mode is higher than 5'.
Going straight up flying may not work, as (I think) that may take more than 5' of movement to move 5' up. But they could 5' fly horizontally or in a downwards angle without an issue.
You'll sometimes run into incorporeal creatures whose tactics include 5' stepping into solid obstacles, like walls.
thaX
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Pathfinder Lost Omens, Rulebook, Starfinder Roleplaying Game Subscriber
There is a particular monster in a Scenario that five foot steps from below ground to full attack a target.
BTW, 5' step is not a move action, it only taken in place of movement, but one can still use the move action for other things after a 5'step, like store a weapon, pull out a potion, or still use a full attack action.